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13th International Conference on Silicon Carbide and Related Materials 2009. Trans Tech Publications. Recuperado de:
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GALVEZ, G. A. F. J.(2010).
Quality control and electrical properties of thin amorphous (SiC)1-x(AlN)x films produced by radio frequency dual magnetron sputtering. Materials Science Forum Vols. Volumen: 645. (pp. 1199 - 1202).